Sputtering Sources

AJA International, Inc. has developed well over 100 different types of magnetron sputtering sources since 1991 including many sources specifically designed for specialty applications. Unique rectangular, circular, turret and cylindrical versions are offered depending on the substrate geometries, chamber configurations, target material constraints and the desired film specification. See further details below or contact AJA about your requirements.

HV & UHV Sources

  • Stiletto Series HV Sources

    • Stiletto Series Circular Sources 1"-4"

    • Stiletto Series Rectangular Sources

    • End mounted - for tube coating

  • A300 Series UHV Sources

    • A300-XP UHV Sources 1"-6"

    • CTM Series Sources

Specialty Sources

  • Turrets and cluster flanges

  • STX & STXL Series Sources

    • STX Series Circular Sources 5"-12"

    • STXL Series Rectangular Sources 75mm x 300 mm to 150 mm x 1.0 m

  • Cylindrical Target Sources

    • For 360° immersion coating