Equipping Innovation
With over 35 years of excellence in manufacturing, AJA International, Inc. is fueling a global golden age of innovation in the world of thin film coating & deposition.
WELCOME TO AJA INTERNATIONAL, INC.
AJA is a manufacturer of thin film deposition systems including magnetron sputtering, e-beam evaporation, thermal evaporation, and ion milling systems. Founded in Scituate, MA, USA in 1989 by William Hale, MBA, BS Physics, the company was established as a supplier of innovative physical vapor deposition (PVD) products. With many systems and magnetron sputter sources shipped worldwide, AJA International, Inc. continues to discover innovative design solutions which are often copied but never equaled. The company truly remains the cutting edge in thin film technology.
SPUTTERING
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ION MILLING
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HYBRID
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EVAPORATION
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WHAT’S NEW AT AJA
SBE-6 Series Sputter Beam Epitaxy (SBE) Deposition System
The SBE-6 Series Sputter Beam Epitaxy (SBE) Deposition System combines deposition quality that rivals molecular beam epitaxy (MBE) with the ease, flexibility, and lower cost of sputtering. This is accomplished through a unique sputtering geometry, developed through extensive research. The SBE-6 Series enables the co-deposition or sequential deposition of up to six distinct materials while minimizing cross-contamination. The system has proven performance to grow epitaxial films of high crystallinity, precise stoichiometry and atomically flat interfaces. A quartz crystal monitor provides deposition rate calibration from elemental targets, providing the option to precisely form compounds without the expense or difficulty of compound targets. This advanced platform integrates years of refinement in deposition dynamics within AJA International’s proven engineering framework and high-performance components recognized globally for their reliability.
WHAT’S NEW AT AJA
The Educational Series Deposition System
AJA International is excited to partner with educators to design an accessible system dedicated for training the next generation of technology specialists. The Educational Series system features a magnetron sputtering gun for coating as well as RF bias etch on substrates up to 2” diameter. Manual operation mode gives the student direct insight into typical controls of a vacuum process tool. Students can receive hands-on instruction in loading samples, changing sputtering targets, creating thin film coatings, or doing substrate etch for material removal or surface preparation. An available residual gas analyzer provides quantitative insights into the composition of the vacuum environment and its impact on processes. Vacuum science and technology concepts can be taught and demonstrated. The system is almost completely self-contained, requiring only a 110V power outlet and a source of process gas (typically argon). Operation can readily be carried out in a classroom or instructional laboratory. Its low cost, small size, simple loading and unloading and integrated safety features make it an attractive instructional aid that greatly enhances technical education programs.
WHAT’S NEW AT AJA
ATC-MC Multi-Chamber Deposition Tool with UHV Transfer Tube & Load-Lock
The ATC-HY Multi-Chamber Deposition System features two Magnetron Sputtering Process Chambers, each dedicated to metal and oxide deposition. Each chamber is equipped with a confocal sputter source configuration, capable of handling 4” wafers, substrate heating up to 1000°C, azimuthal rotation, and RF biasing. These deposition chambers are interconnected via a UHV Transfer Tunnel, allowing for in-situ wafer transfer at vacuum levels below 10⁻⁸ Torr. Additionally, the load-lock chamber includes a degas station, which can heat substrates up to 200°C before they enter the UHV transfer tunnel. The flexible design of the UHV Transfer Tunnel allows for future expansion, either in a linear or right-angle orientation, and supports integration with both AJA and non-AJA systems.
